7/16/2012	12:08:49 AM	Helium valve closed
7/16/2012	12:08:49 AM	PH3 valve closed
7/16/2012	12:08:49 AM	Main Vac valve closed
7/16/2012	12:08:49 AM	Bypass valve closed
7/16/2012	12:08:49 AM	H2 valve opened
7/16/2012	12:08:49 AM	BCl3 valve opened
7/16/2012	12:08:49 AM	SiCl4 pre valve opened
7/16/2012	12:08:49 AM	SiCl4 post valve opened
7/16/2012	12:08:49 AM	Bubbler valve opened
7/16/2012	12:08:49 AM	Helium MFC set to  0.000000
7/16/2012	12:08:49 AM	H2 MFC set to  450.000000
7/16/2012	12:08:49 AM	BCl3 MFC set to  0.750000
7/16/2012	12:08:49 AM	PH3 MFC set to  0.000000
7/16/2012	12:08:49 AM	SiCl4 MFC set to  50.000000
7/16/2012	12:08:49 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	12:08:49 AM	Tube furnace set to 1000
7/16/2012	12:42:49 AM	Helium valve closed
7/16/2012	12:42:49 AM	BCl3 valve closed
7/16/2012	12:42:49 AM	PH3 valve closed
7/16/2012	12:42:49 AM	SiCl4 pre valve closed
7/16/2012	12:42:49 AM	SiCl4 post valve closed
7/16/2012	12:42:49 AM	Main Vac valve closed
7/16/2012	12:42:49 AM	Bypass valve closed
7/16/2012	12:42:49 AM	H2 valve opened
7/16/2012	12:42:49 AM	Bubbler valve opened
7/16/2012	12:42:49 AM	Helium MFC set to  0.000000
7/16/2012	12:42:49 AM	H2 MFC set to  500.000000
7/16/2012	12:42:49 AM	BCl3 MFC set to  0.000000
7/16/2012	12:42:49 AM	PH3 MFC set to  0.000000
7/16/2012	12:42:49 AM	SiCl4 MFC set to  0.000000
7/16/2012	12:42:49 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	12:42:49 AM	Tube furnace set to 750
7/16/2012	12:57:49 AM	Helium valve closed
7/16/2012	12:57:49 AM	BCl3 valve closed
7/16/2012	12:57:49 AM	PH3 valve closed
7/16/2012	12:57:49 AM	SiCl4 pre valve closed
7/16/2012	12:57:49 AM	SiCl4 post valve closed
7/16/2012	12:57:49 AM	Main Vac valve closed
7/16/2012	12:57:49 AM	Bypass valve closed
7/16/2012	12:57:49 AM	H2 valve opened
7/16/2012	12:57:49 AM	Bubbler valve opened
7/16/2012	12:57:49 AM	Helium MFC set to  0.000000
7/16/2012	12:57:49 AM	H2 MFC set to  500.000000
7/16/2012	12:57:49 AM	BCl3 MFC set to  0.000000
7/16/2012	12:57:49 AM	PH3 MFC set to  0.000000
7/16/2012	12:57:49 AM	SiCl4 MFC set to  0.000000
7/16/2012	12:57:49 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	12:57:49 AM	Tube furnace set to 0
7/16/2012	1:17:49 AM	Helium valve closed
7/16/2012	1:17:49 AM	H2 valve closed
7/16/2012	1:17:49 AM	BCl3 valve closed
7/16/2012	1:17:49 AM	PH3 valve closed
7/16/2012	1:17:49 AM	SiCl4 pre valve closed
7/16/2012	1:17:49 AM	SiCl4 post valve closed
7/16/2012	1:17:49 AM	Main Vac valve closed
7/16/2012	1:17:49 AM	Bypass valve closed
7/16/2012	1:17:49 AM	Bubbler valve closed
7/16/2012	1:17:49 AM	Helium MFC set to  0.000000
7/16/2012	1:17:49 AM	H2 MFC set to  0.000000
7/16/2012	1:17:49 AM	BCl3 MFC set to  0.000000
7/16/2012	1:17:49 AM	PH3 MFC set to  0.000000
7/16/2012	1:17:49 AM	SiCl4 MFC set to  0.000000
7/16/2012	1:17:49 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	1:17:49 AM	Tube furnace set to 0
7/16/2012	1:17:52 AM	Helium valve closed
7/16/2012	1:17:52 AM	H2 valve closed
7/16/2012	1:17:52 AM	BCl3 valve closed
7/16/2012	1:17:52 AM	PH3 valve closed
7/16/2012	1:17:52 AM	SiCl4 pre valve closed
7/16/2012	1:17:52 AM	SiCl4 post valve closed
7/16/2012	1:17:52 AM	Main Vac valve closed
7/16/2012	1:17:52 AM	Bubbler valve closed
7/16/2012	1:17:52 AM	Bypass valve opened
7/16/2012	1:17:52 AM	Helium MFC set to  0.000000
7/16/2012	1:17:52 AM	H2 MFC set to  0.000000
7/16/2012	1:17:52 AM	BCl3 MFC set to  0.000000
7/16/2012	1:17:52 AM	PH3 MFC set to  0.000000
7/16/2012	1:17:52 AM	SiCl4 MFC set to  0.000000
7/16/2012	1:17:52 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	1:17:53 AM	Tube furnace set to 0
7/16/2012	1:18:24 AM	Helium valve closed
7/16/2012	1:18:24 AM	H2 valve closed
7/16/2012	1:18:24 AM	BCl3 valve closed
7/16/2012	1:18:24 AM	PH3 valve closed
7/16/2012	1:18:24 AM	SiCl4 pre valve closed
7/16/2012	1:18:24 AM	SiCl4 post valve closed
7/16/2012	1:18:24 AM	Main Vac valve closed
7/16/2012	1:18:24 AM	Bubbler valve closed
7/16/2012	1:18:24 AM	Bypass valve opened
7/16/2012	1:18:24 AM	Helium MFC set to  0.000000
7/16/2012	1:18:24 AM	H2 MFC set to  0.000000
7/16/2012	1:18:24 AM	BCl3 MFC set to  0.000000
7/16/2012	1:18:24 AM	PH3 MFC set to  0.000000
7/16/2012	1:18:24 AM	SiCl4 MFC set to  0.000000
7/16/2012	1:18:24 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	1:18:25 AM	Tube furnace set to 0
7/16/2012	1:19:25 AM	Helium valve closed
7/16/2012	1:19:25 AM	H2 valve closed
7/16/2012	1:19:25 AM	BCl3 valve closed
7/16/2012	1:19:25 AM	PH3 valve closed
7/16/2012	1:19:25 AM	SiCl4 pre valve closed
7/16/2012	1:19:25 AM	SiCl4 post valve closed
7/16/2012	1:19:25 AM	Bypass valve closed
7/16/2012	1:19:25 AM	Bubbler valve closed
7/16/2012	1:19:25 AM	Main Vac valve opened
7/16/2012	1:19:25 AM	Helium MFC set to  0.000000
7/16/2012	1:19:25 AM	H2 MFC set to  0.000000
7/16/2012	1:19:25 AM	BCl3 MFC set to  0.000000
7/16/2012	1:19:25 AM	PH3 MFC set to  0.000000
7/16/2012	1:19:25 AM	SiCl4 MFC set to  0.000000
7/16/2012	1:19:25 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	1:19:25 AM	Tube furnace set to 0
7/16/2012	2:19:25 AM	Run finished at 2:19 AM
7/16/2012	8:03:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2012	8:03:30 AM	Recipe started at 8:03 AM
7/16/2012	8:03:30 AM	Helium valve closed
7/16/2012	8:03:30 AM	H2 valve closed
7/16/2012	8:03:30 AM	BCl3 valve closed
7/16/2012	8:03:31 AM	PH3 valve closed
7/16/2012	8:03:31 AM	SiCl4 pre valve closed
7/16/2012	8:03:31 AM	SiCl4 post valve closed
7/16/2012	8:03:31 AM	Main Vac valve closed
7/16/2012	8:03:31 AM	Bypass valve closed
7/16/2012	8:03:31 AM	Bubbler valve closed
7/16/2012	8:03:31 AM	Helium MFC set to  0.000000
7/16/2012	8:03:31 AM	H2 MFC set to  0.000000
7/16/2012	8:03:31 AM	BCl3 MFC set to  0.000000
7/16/2012	8:03:31 AM	PH3 MFC set to  0.000000
7/16/2012	8:03:31 AM	SiCl4 MFC set to  0.000000
7/16/2012	8:03:31 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	8:03:31 AM	Tube furnace set to 0
7/16/2012	8:03:34 AM	H2 valve closed
7/16/2012	8:03:34 AM	BCl3 valve closed
7/16/2012	8:03:34 AM	PH3 valve closed
7/16/2012	8:03:34 AM	SiCl4 pre valve closed
7/16/2012	8:03:34 AM	SiCl4 post valve closed
7/16/2012	8:03:34 AM	Main Vac valve closed
7/16/2012	8:03:34 AM	Bypass valve closed
7/16/2012	8:03:34 AM	Bubbler valve closed
7/16/2012	8:03:34 AM	Helium valve opened
7/16/2012	8:03:34 AM	Helium MFC set to  500.000000
7/16/2012	8:03:34 AM	H2 MFC set to  0.000000
7/16/2012	8:03:34 AM	BCl3 MFC set to  0.000000
7/16/2012	8:03:34 AM	PH3 MFC set to  0.000000
7/16/2012	8:03:34 AM	SiCl4 MFC set to  0.000000
7/16/2012	8:03:34 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	8:03:34 AM	Tube furnace set to 0
7/16/2012	8:04:46 AM	Helium valve closed
7/16/2012	8:04:46 AM	H2 valve closed
7/16/2012	8:04:46 AM	BCl3 valve closed
7/16/2012	8:04:46 AM	PH3 valve closed
7/16/2012	8:04:46 AM	SiCl4 pre valve closed
7/16/2012	8:04:46 AM	SiCl4 post valve closed
7/16/2012	8:04:46 AM	Main Vac valve closed
7/16/2012	8:04:46 AM	Bypass valve closed
7/16/2012	8:04:46 AM	Bubbler valve closed
7/16/2012	8:04:46 AM	Helium MFC set to  0.000000
7/16/2012	8:04:46 AM	H2 MFC set to  0.000000
7/16/2012	8:04:46 AM	BCl3 MFC set to  0.000000
7/16/2012	8:04:46 AM	PH3 MFC set to  0.000000
7/16/2012	8:04:46 AM	SiCl4 MFC set to  0.000000
7/16/2012	8:04:46 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	8:04:46 AM	Tube furnace set to 0
7/16/2012	8:04:47 AM	Run finished at 8:04 AM
7/16/2012	8:04:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2012	8:08:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2012	8:08:33 AM	Recipe started at 8:08 AM
7/16/2012	8:08:33 AM	Helium valve closed
7/16/2012	8:08:33 AM	H2 valve closed
7/16/2012	8:08:33 AM	BCl3 valve closed
7/16/2012	8:08:33 AM	PH3 valve closed
7/16/2012	8:08:33 AM	SiCl4 pre valve closed
7/16/2012	8:08:33 AM	SiCl4 post valve closed
7/16/2012	8:08:33 AM	Main Vac valve closed
7/16/2012	8:08:33 AM	Bubbler valve closed
7/16/2012	8:08:33 AM	Bypass valve opened
7/16/2012	8:08:33 AM	Helium MFC set to  0.000000
7/16/2012	8:08:33 AM	H2 MFC set to  0.000000
7/16/2012	8:08:33 AM	BCl3 MFC set to  0.000000
7/16/2012	8:08:33 AM	PH3 MFC set to  0.000000
7/16/2012	8:08:33 AM	SiCl4 MFC set to  0.000000
7/16/2012	8:08:33 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	8:08:34 AM	Tube furnace set to 0
7/16/2012	8:09:42 AM	Helium valve closed
7/16/2012	8:09:42 AM	H2 valve closed
7/16/2012	8:09:42 AM	BCl3 valve closed
7/16/2012	8:09:42 AM	PH3 valve closed
7/16/2012	8:09:42 AM	SiCl4 pre valve closed
7/16/2012	8:09:42 AM	SiCl4 post valve closed
7/16/2012	8:09:42 AM	Main Vac valve closed
7/16/2012	8:09:42 AM	Bubbler valve closed
7/16/2012	8:09:42 AM	Bypass valve opened
7/16/2012	8:09:42 AM	Helium MFC set to  0.000000
7/16/2012	8:09:42 AM	H2 MFC set to  0.000000
7/16/2012	8:09:42 AM	BCl3 MFC set to  0.000000
7/16/2012	8:09:42 AM	PH3 MFC set to  0.000000
7/16/2012	8:09:42 AM	SiCl4 MFC set to  0.000000
7/16/2012	8:09:42 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	8:09:43 AM	Tube furnace set to 0
7/16/2012	8:10:43 AM	Helium valve closed
7/16/2012	8:10:43 AM	H2 valve closed
7/16/2012	8:10:43 AM	BCl3 valve closed
7/16/2012	8:10:43 AM	PH3 valve closed
7/16/2012	8:10:43 AM	SiCl4 pre valve closed
7/16/2012	8:10:43 AM	SiCl4 post valve closed
7/16/2012	8:10:43 AM	Bypass valve closed
7/16/2012	8:10:43 AM	Bubbler valve closed
7/16/2012	8:10:43 AM	Main Vac valve opened
7/16/2012	8:10:43 AM	Helium MFC set to  0.000000
7/16/2012	8:10:43 AM	H2 MFC set to  0.000000
7/16/2012	8:10:43 AM	BCl3 MFC set to  0.000000
7/16/2012	8:10:43 AM	PH3 MFC set to  0.000000
7/16/2012	8:10:43 AM	SiCl4 MFC set to  0.000000
7/16/2012	8:10:43 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	8:10:43 AM	Tube furnace set to 0
7/16/2012	8:10:44 AM	Run finished at 8:10 AM
7/16/2012	8:10:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2012	10:20:51 AM	Main Vac valve closed
7/16/2012	10:21:04 AM	Main Vac valve opened
7/16/2012	10:22:25 AM	Recipe started at 10:22 AM
7/16/2012	10:22:25 AM	Helium valve closed
7/16/2012	10:22:25 AM	H2 valve closed
7/16/2012	10:22:25 AM	BCl3 valve closed
7/16/2012	10:22:25 AM	PH3 valve closed
7/16/2012	10:22:25 AM	SiCl4 pre valve closed
7/16/2012	10:22:25 AM	SiCl4 post valve closed
7/16/2012	10:22:25 AM	Bypass valve closed
7/16/2012	10:22:25 AM	Bubbler valve closed
7/16/2012	10:22:26 AM	Main Vac valve opened
7/16/2012	10:22:26 AM	Helium MFC set to  0.000000
7/16/2012	10:22:26 AM	H2 MFC set to  0.000000
7/16/2012	10:22:26 AM	BCl3 MFC set to  0.000000
7/16/2012	10:22:26 AM	PH3 MFC set to  0.000000
7/16/2012	10:22:26 AM	SiCl4 MFC set to  0.000000
7/16/2012	10:22:26 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	10:22:26 AM	Tube furnace set to 0
7/16/2012	10:22:29 AM	Helium valve closed
7/16/2012	10:22:29 AM	H2 valve closed
7/16/2012	10:22:29 AM	BCl3 valve closed
7/16/2012	10:22:29 AM	PH3 valve closed
7/16/2012	10:22:29 AM	SiCl4 pre valve closed
7/16/2012	10:22:29 AM	SiCl4 post valve closed
7/16/2012	10:22:29 AM	Main Vac valve closed
7/16/2012	10:22:29 AM	Bypass valve closed
7/16/2012	10:22:29 AM	Bubbler valve closed
7/16/2012	10:22:29 AM	Helium MFC set to  0.000000
7/16/2012	10:22:29 AM	H2 MFC set to  0.000000
7/16/2012	10:22:29 AM	BCl3 MFC set to  0.000000
7/16/2012	10:22:29 AM	PH3 MFC set to  0.000000
7/16/2012	10:22:29 AM	SiCl4 MFC set to  0.000000
7/16/2012	10:22:29 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	10:22:29 AM	Tube furnace set to 0
7/16/2012	10:22:32 AM	Helium valve closed
7/16/2012	10:22:32 AM	BCl3 valve closed
7/16/2012	10:22:32 AM	PH3 valve closed
7/16/2012	10:22:32 AM	SiCl4 pre valve closed
7/16/2012	10:22:32 AM	SiCl4 post valve closed
7/16/2012	10:22:32 AM	Main Vac valve closed
7/16/2012	10:22:32 AM	Bypass valve closed
7/16/2012	10:22:32 AM	Bubbler valve closed
7/16/2012	10:22:32 AM	H2 valve opened
7/16/2012	10:22:32 AM	Helium MFC set to  0.000000
7/16/2012	10:22:32 AM	H2 MFC set to  500.000000
7/16/2012	10:22:32 AM	BCl3 MFC set to  0.000000
7/16/2012	10:22:32 AM	PH3 MFC set to  0.000000
7/16/2012	10:22:32 AM	SiCl4 MFC set to  0.000000
7/16/2012	10:22:32 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	10:22:32 AM	Tube furnace set to 0
7/16/2012	10:23:48 AM	Helium valve closed
7/16/2012	10:23:48 AM	BCl3 valve closed
7/16/2012	10:23:48 AM	PH3 valve closed
7/16/2012	10:23:48 AM	SiCl4 pre valve closed
7/16/2012	10:23:48 AM	SiCl4 post valve closed
7/16/2012	10:23:48 AM	Main Vac valve closed
7/16/2012	10:23:48 AM	Bypass valve closed
7/16/2012	10:23:48 AM	H2 valve opened
7/16/2012	10:23:48 AM	Bubbler valve opened
7/16/2012	10:23:48 AM	Helium MFC set to  0.000000
7/16/2012	10:23:48 AM	H2 MFC set to  500.000000
7/16/2012	10:23:48 AM	BCl3 MFC set to  0.000000
7/16/2012	10:23:48 AM	PH3 MFC set to  0.000000
7/16/2012	10:23:48 AM	SiCl4 MFC set to  0.000000
7/16/2012	10:23:48 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	10:23:48 AM	Tube furnace set to 0
7/16/2012	10:23:49 AM	Helium valve closed
7/16/2012	10:23:49 AM	BCl3 valve closed
7/16/2012	10:23:49 AM	PH3 valve closed
7/16/2012	10:23:49 AM	SiCl4 pre valve closed
7/16/2012	10:23:49 AM	SiCl4 post valve closed
7/16/2012	10:23:49 AM	Main Vac valve closed
7/16/2012	10:23:49 AM	Bypass valve closed
7/16/2012	10:23:49 AM	H2 valve opened
7/16/2012	10:23:49 AM	Bubbler valve opened
7/16/2012	10:23:49 AM	Helium MFC set to  0.000000
7/16/2012	10:23:49 AM	H2 MFC set to  500.000000
7/16/2012	10:23:49 AM	BCl3 MFC set to  0.000000
7/16/2012	10:23:49 AM	PH3 MFC set to  0.000000
7/16/2012	10:23:49 AM	SiCl4 MFC set to  0.000000
7/16/2012	10:23:49 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	10:23:50 AM	Tube furnace set to 1000
7/16/2012	10:48:50 AM	Helium valve closed
7/16/2012	10:48:50 AM	PH3 valve closed
7/16/2012	10:48:50 AM	Main Vac valve closed
7/16/2012	10:48:50 AM	Bypass valve closed
7/16/2012	10:48:50 AM	H2 valve opened
7/16/2012	10:48:50 AM	BCl3 valve opened
7/16/2012	10:48:50 AM	SiCl4 pre valve opened
7/16/2012	10:48:50 AM	SiCl4 post valve opened
7/16/2012	10:48:50 AM	Bubbler valve opened
7/16/2012	10:48:50 AM	Helium MFC set to  0.000000
7/16/2012	10:48:50 AM	H2 MFC set to  450.000000
7/16/2012	10:48:50 AM	BCl3 MFC set to  0.750000
7/16/2012	10:48:50 AM	PH3 MFC set to  0.000000
7/16/2012	10:48:50 AM	SiCl4 MFC set to  50.000000
7/16/2012	10:48:50 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	10:48:50 AM	Tube furnace set to 1000
7/16/2012	11:22:50 AM	Helium valve closed
7/16/2012	11:22:50 AM	BCl3 valve closed
7/16/2012	11:22:50 AM	PH3 valve closed
7/16/2012	11:22:50 AM	SiCl4 pre valve closed
7/16/2012	11:22:50 AM	SiCl4 post valve closed
7/16/2012	11:22:50 AM	Main Vac valve closed
7/16/2012	11:22:50 AM	Bypass valve closed
7/16/2012	11:22:50 AM	H2 valve opened
7/16/2012	11:22:50 AM	Bubbler valve opened
7/16/2012	11:22:50 AM	Helium MFC set to  0.000000
7/16/2012	11:22:50 AM	H2 MFC set to  500.000000
7/16/2012	11:22:50 AM	BCl3 MFC set to  0.000000
7/16/2012	11:22:50 AM	PH3 MFC set to  0.000000
7/16/2012	11:22:50 AM	SiCl4 MFC set to  0.000000
7/16/2012	11:22:50 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	11:22:50 AM	Tube furnace set to 750
7/16/2012	11:37:50 AM	Helium valve closed
7/16/2012	11:37:50 AM	BCl3 valve closed
7/16/2012	11:37:50 AM	PH3 valve closed
7/16/2012	11:37:50 AM	SiCl4 pre valve closed
7/16/2012	11:37:50 AM	SiCl4 post valve closed
7/16/2012	11:37:50 AM	Main Vac valve closed
7/16/2012	11:37:50 AM	Bypass valve closed
7/16/2012	11:37:50 AM	H2 valve opened
7/16/2012	11:37:50 AM	Bubbler valve opened
7/16/2012	11:37:50 AM	Helium MFC set to  0.000000
7/16/2012	11:37:50 AM	H2 MFC set to  500.000000
7/16/2012	11:37:50 AM	BCl3 MFC set to  0.000000
7/16/2012	11:37:50 AM	PH3 MFC set to  0.000000
7/16/2012	11:37:50 AM	SiCl4 MFC set to  0.000000
7/16/2012	11:37:50 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	11:37:50 AM	Tube furnace set to 0
7/16/2012	11:57:50 AM	Helium valve closed
7/16/2012	11:57:50 AM	H2 valve closed
7/16/2012	11:57:50 AM	BCl3 valve closed
7/16/2012	11:57:50 AM	PH3 valve closed
7/16/2012	11:57:50 AM	SiCl4 pre valve closed
7/16/2012	11:57:50 AM	SiCl4 post valve closed
7/16/2012	11:57:50 AM	Main Vac valve closed
7/16/2012	11:57:50 AM	Bypass valve closed
7/16/2012	11:57:50 AM	Bubbler valve closed
7/16/2012	11:57:50 AM	Helium MFC set to  0.000000
7/16/2012	11:57:50 AM	H2 MFC set to  0.000000
7/16/2012	11:57:50 AM	BCl3 MFC set to  0.000000
7/16/2012	11:57:50 AM	PH3 MFC set to  0.000000
7/16/2012	11:57:50 AM	SiCl4 MFC set to  0.000000
7/16/2012	11:57:50 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	11:57:50 AM	Tube furnace set to 0
7/16/2012	11:57:53 AM	Helium valve closed
7/16/2012	11:57:53 AM	H2 valve closed
7/16/2012	11:57:53 AM	BCl3 valve closed
7/16/2012	11:57:53 AM	PH3 valve closed
7/16/2012	11:57:53 AM	SiCl4 pre valve closed
7/16/2012	11:57:53 AM	SiCl4 post valve closed
7/16/2012	11:57:53 AM	Main Vac valve closed
7/16/2012	11:57:53 AM	Bubbler valve closed
7/16/2012	11:57:53 AM	Bypass valve opened
7/16/2012	11:57:53 AM	Helium MFC set to  0.000000
7/16/2012	11:57:53 AM	H2 MFC set to  0.000000
7/16/2012	11:57:53 AM	BCl3 MFC set to  0.000000
7/16/2012	11:57:53 AM	PH3 MFC set to  0.000000
7/16/2012	11:57:53 AM	SiCl4 MFC set to  0.000000
7/16/2012	11:57:53 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	11:57:54 AM	Tube furnace set to 0
7/16/2012	11:58:29 AM	Helium valve closed
7/16/2012	11:58:29 AM	H2 valve closed
7/16/2012	11:58:29 AM	BCl3 valve closed
7/16/2012	11:58:29 AM	PH3 valve closed
7/16/2012	11:58:29 AM	SiCl4 pre valve closed
7/16/2012	11:58:29 AM	SiCl4 post valve closed
7/16/2012	11:58:29 AM	Main Vac valve closed
7/16/2012	11:58:29 AM	Bubbler valve closed
7/16/2012	11:58:29 AM	Bypass valve opened
7/16/2012	11:58:29 AM	Helium MFC set to  0.000000
7/16/2012	11:58:29 AM	H2 MFC set to  0.000000
7/16/2012	11:58:29 AM	BCl3 MFC set to  0.000000
7/16/2012	11:58:29 AM	PH3 MFC set to  0.000000
7/16/2012	11:58:29 AM	SiCl4 MFC set to  0.000000
7/16/2012	11:58:29 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	11:58:29 AM	Tube furnace set to 0
7/16/2012	11:59:29 AM	Helium valve closed
7/16/2012	11:59:29 AM	H2 valve closed
7/16/2012	11:59:29 AM	BCl3 valve closed
7/16/2012	11:59:29 AM	PH3 valve closed
7/16/2012	11:59:29 AM	SiCl4 pre valve closed
7/16/2012	11:59:29 AM	SiCl4 post valve closed
7/16/2012	11:59:29 AM	Bypass valve closed
7/16/2012	11:59:29 AM	Bubbler valve closed
7/16/2012	11:59:29 AM	Main Vac valve opened
7/16/2012	11:59:29 AM	Helium MFC set to  0.000000
7/16/2012	11:59:29 AM	H2 MFC set to  0.000000
7/16/2012	11:59:29 AM	BCl3 MFC set to  0.000000
7/16/2012	11:59:29 AM	PH3 MFC set to  0.000000
7/16/2012	11:59:29 AM	SiCl4 MFC set to  0.000000
7/16/2012	11:59:29 AM	Bypass solenoid MFC set to  0.000000
7/16/2012	11:59:29 AM	Tube furnace set to 0
7/16/2012	12:06:10 PM	Run finished at 12:06 PM
7/16/2012	12:06:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2012	12:06:13 PM	Recipe started at 12:06 PM
7/16/2012	12:06:13 PM	Helium valve closed
7/16/2012	12:06:13 PM	H2 valve closed
7/16/2012	12:06:13 PM	BCl3 valve closed
7/16/2012	12:06:13 PM	PH3 valve closed
7/16/2012	12:06:13 PM	SiCl4 pre valve closed
7/16/2012	12:06:13 PM	SiCl4 post valve closed
7/16/2012	12:06:13 PM	Main Vac valve closed
7/16/2012	12:06:13 PM	Bypass valve closed
7/16/2012	12:06:13 PM	Bubbler valve closed
7/16/2012	12:06:13 PM	Helium MFC set to  0.000000
7/16/2012	12:06:13 PM	H2 MFC set to  0.000000
7/16/2012	12:06:13 PM	BCl3 MFC set to  0.000000
7/16/2012	12:06:13 PM	PH3 MFC set to  0.000000
7/16/2012	12:06:13 PM	SiCl4 MFC set to  0.000000
7/16/2012	12:06:13 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	12:06:13 PM	Tube furnace set to 0
7/16/2012	12:06:16 PM	H2 valve closed
7/16/2012	12:06:16 PM	BCl3 valve closed
7/16/2012	12:06:16 PM	PH3 valve closed
7/16/2012	12:06:16 PM	SiCl4 pre valve closed
7/16/2012	12:06:16 PM	SiCl4 post valve closed
7/16/2012	12:06:16 PM	Main Vac valve closed
7/16/2012	12:06:16 PM	Bypass valve closed
7/16/2012	12:06:16 PM	Bubbler valve closed
7/16/2012	12:06:16 PM	Helium valve opened
7/16/2012	12:06:16 PM	Helium MFC set to  500.000000
7/16/2012	12:06:16 PM	H2 MFC set to  0.000000
7/16/2012	12:06:16 PM	BCl3 MFC set to  0.000000
7/16/2012	12:06:16 PM	PH3 MFC set to  0.000000
7/16/2012	12:06:16 PM	SiCl4 MFC set to  0.000000
7/16/2012	12:06:16 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	12:06:16 PM	Tube furnace set to 0
7/16/2012	12:07:26 PM	Helium valve closed
7/16/2012	12:07:26 PM	H2 valve closed
7/16/2012	12:07:26 PM	BCl3 valve closed
7/16/2012	12:07:26 PM	PH3 valve closed
7/16/2012	12:07:26 PM	SiCl4 pre valve closed
7/16/2012	12:07:26 PM	SiCl4 post valve closed
7/16/2012	12:07:26 PM	Main Vac valve closed
7/16/2012	12:07:26 PM	Bypass valve closed
7/16/2012	12:07:26 PM	Bubbler valve closed
7/16/2012	12:07:26 PM	Helium MFC set to  0.000000
7/16/2012	12:07:26 PM	H2 MFC set to  0.000000
7/16/2012	12:07:26 PM	BCl3 MFC set to  0.000000
7/16/2012	12:07:26 PM	PH3 MFC set to  0.000000
7/16/2012	12:07:26 PM	SiCl4 MFC set to  0.000000
7/16/2012	12:07:26 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	12:07:26 PM	Tube furnace set to 0
7/16/2012	12:07:27 PM	Run finished at 12:07 PM
7/16/2012	12:07:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2012	12:10:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2012	12:10:44 PM	Recipe started at 12:10 PM
7/16/2012	12:10:44 PM	Helium valve closed
7/16/2012	12:10:44 PM	H2 valve closed
7/16/2012	12:10:44 PM	BCl3 valve closed
7/16/2012	12:10:44 PM	PH3 valve closed
7/16/2012	12:10:44 PM	SiCl4 pre valve closed
7/16/2012	12:10:44 PM	SiCl4 post valve closed
7/16/2012	12:10:44 PM	Main Vac valve closed
7/16/2012	12:10:44 PM	Bubbler valve closed
7/16/2012	12:10:44 PM	Bypass valve opened
7/16/2012	12:10:44 PM	Helium MFC set to  0.000000
7/16/2012	12:10:44 PM	H2 MFC set to  0.000000
7/16/2012	12:10:44 PM	BCl3 MFC set to  0.000000
7/16/2012	12:10:44 PM	PH3 MFC set to  0.000000
7/16/2012	12:10:44 PM	SiCl4 MFC set to  0.000000
7/16/2012	12:10:44 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	12:10:45 PM	Tube furnace set to 0
7/16/2012	12:11:52 PM	Helium valve closed
7/16/2012	12:11:52 PM	H2 valve closed
7/16/2012	12:11:52 PM	BCl3 valve closed
7/16/2012	12:11:52 PM	PH3 valve closed
7/16/2012	12:11:52 PM	SiCl4 pre valve closed
7/16/2012	12:11:52 PM	SiCl4 post valve closed
7/16/2012	12:11:52 PM	Main Vac valve closed
7/16/2012	12:11:52 PM	Bubbler valve closed
7/16/2012	12:11:52 PM	Bypass valve opened
7/16/2012	12:11:52 PM	Helium MFC set to  0.000000
7/16/2012	12:11:52 PM	H2 MFC set to  0.000000
7/16/2012	12:11:52 PM	BCl3 MFC set to  0.000000
7/16/2012	12:11:52 PM	PH3 MFC set to  0.000000
7/16/2012	12:11:52 PM	SiCl4 MFC set to  0.000000
7/16/2012	12:11:52 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	12:11:52 PM	Tube furnace set to 0
7/16/2012	12:12:52 PM	Helium valve closed
7/16/2012	12:12:52 PM	H2 valve closed
7/16/2012	12:12:52 PM	BCl3 valve closed
7/16/2012	12:12:52 PM	PH3 valve closed
7/16/2012	12:12:52 PM	SiCl4 pre valve closed
7/16/2012	12:12:52 PM	SiCl4 post valve closed
7/16/2012	12:12:52 PM	Bypass valve closed
7/16/2012	12:12:52 PM	Bubbler valve closed
7/16/2012	12:12:52 PM	Main Vac valve opened
7/16/2012	12:12:52 PM	Helium MFC set to  0.000000
7/16/2012	12:12:52 PM	H2 MFC set to  0.000000
7/16/2012	12:12:52 PM	BCl3 MFC set to  0.000000
7/16/2012	12:12:52 PM	PH3 MFC set to  0.000000
7/16/2012	12:12:52 PM	SiCl4 MFC set to  0.000000
7/16/2012	12:12:52 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	12:12:52 PM	Tube furnace set to 0
7/16/2012	12:12:53 PM	Run finished at 12:12 PM
7/16/2012	12:12:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2012	12:14:09 PM	Recipe started at 12:14 PM
7/16/2012	12:14:09 PM	Helium valve closed
7/16/2012	12:14:09 PM	H2 valve closed
7/16/2012	12:14:09 PM	BCl3 valve closed
7/16/2012	12:14:09 PM	PH3 valve closed
7/16/2012	12:14:09 PM	SiCl4 pre valve closed
7/16/2012	12:14:09 PM	SiCl4 post valve closed
7/16/2012	12:14:09 PM	Bypass valve closed
7/16/2012	12:14:09 PM	Bubbler valve closed
7/16/2012	12:14:09 PM	Main Vac valve opened
7/16/2012	12:14:09 PM	Helium MFC set to  0.000000
7/16/2012	12:14:09 PM	H2 MFC set to  0.000000
7/16/2012	12:14:09 PM	BCl3 MFC set to  0.000000
7/16/2012	12:14:09 PM	PH3 MFC set to  0.000000
7/16/2012	12:14:09 PM	SiCl4 MFC set to  0.000000
7/16/2012	12:14:09 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	12:14:09 PM	Tube furnace set to 0
7/16/2012	1:44:09 PM	Helium valve closed
7/16/2012	1:44:09 PM	H2 valve closed
7/16/2012	1:44:09 PM	BCl3 valve closed
7/16/2012	1:44:09 PM	PH3 valve closed
7/16/2012	1:44:09 PM	SiCl4 pre valve closed
7/16/2012	1:44:09 PM	SiCl4 post valve closed
7/16/2012	1:44:09 PM	Main Vac valve closed
7/16/2012	1:44:09 PM	Bypass valve closed
7/16/2012	1:44:09 PM	Bubbler valve closed
7/16/2012	1:44:09 PM	Helium MFC set to  0.000000
7/16/2012	1:44:09 PM	H2 MFC set to  0.000000
7/16/2012	1:44:09 PM	BCl3 MFC set to  0.000000
7/16/2012	1:44:09 PM	PH3 MFC set to  0.000000
7/16/2012	1:44:09 PM	SiCl4 MFC set to  0.000000
7/16/2012	1:44:09 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	1:44:10 PM	Tube furnace set to 0
7/16/2012	1:44:13 PM	Helium valve closed
7/16/2012	1:44:13 PM	BCl3 valve closed
7/16/2012	1:44:13 PM	PH3 valve closed
7/16/2012	1:44:13 PM	SiCl4 pre valve closed
7/16/2012	1:44:13 PM	SiCl4 post valve closed
7/16/2012	1:44:13 PM	Main Vac valve closed
7/16/2012	1:44:13 PM	Bypass valve closed
7/16/2012	1:44:13 PM	Bubbler valve closed
7/16/2012	1:44:13 PM	H2 valve opened
7/16/2012	1:44:13 PM	Helium MFC set to  0.000000
7/16/2012	1:44:13 PM	H2 MFC set to  500.000000
7/16/2012	1:44:13 PM	BCl3 MFC set to  0.000000
7/16/2012	1:44:13 PM	PH3 MFC set to  0.000000
7/16/2012	1:44:13 PM	SiCl4 MFC set to  0.000000
7/16/2012	1:44:13 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	1:44:13 PM	Tube furnace set to 0
7/16/2012	1:45:26 PM	Helium valve closed
7/16/2012	1:45:26 PM	BCl3 valve closed
7/16/2012	1:45:26 PM	PH3 valve closed
7/16/2012	1:45:26 PM	SiCl4 pre valve closed
7/16/2012	1:45:26 PM	SiCl4 post valve closed
7/16/2012	1:45:26 PM	Main Vac valve closed
7/16/2012	1:45:26 PM	Bypass valve closed
7/16/2012	1:45:26 PM	H2 valve opened
7/16/2012	1:45:26 PM	Bubbler valve opened
7/16/2012	1:45:26 PM	Helium MFC set to  0.000000
7/16/2012	1:45:26 PM	H2 MFC set to  500.000000
7/16/2012	1:45:26 PM	BCl3 MFC set to  0.000000
7/16/2012	1:45:26 PM	PH3 MFC set to  0.000000
7/16/2012	1:45:26 PM	SiCl4 MFC set to  0.000000
7/16/2012	1:45:26 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	1:45:26 PM	Tube furnace set to 0
7/16/2012	1:45:27 PM	Helium valve closed
7/16/2012	1:45:27 PM	BCl3 valve closed
7/16/2012	1:45:27 PM	PH3 valve closed
7/16/2012	1:45:27 PM	SiCl4 pre valve closed
7/16/2012	1:45:27 PM	SiCl4 post valve closed
7/16/2012	1:45:27 PM	Main Vac valve closed
7/16/2012	1:45:27 PM	Bypass valve closed
7/16/2012	1:45:27 PM	H2 valve opened
7/16/2012	1:45:27 PM	Bubbler valve opened
7/16/2012	1:45:27 PM	Helium MFC set to  0.000000
7/16/2012	1:45:27 PM	H2 MFC set to  500.000000
7/16/2012	1:45:27 PM	BCl3 MFC set to  0.000000
7/16/2012	1:45:27 PM	PH3 MFC set to  0.000000
7/16/2012	1:45:27 PM	SiCl4 MFC set to  0.000000
7/16/2012	1:45:27 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	1:45:27 PM	Tube furnace set to 1000
7/16/2012	2:10:27 PM	Helium valve closed
7/16/2012	2:10:27 PM	PH3 valve closed
7/16/2012	2:10:27 PM	Main Vac valve closed
7/16/2012	2:10:27 PM	Bypass valve closed
7/16/2012	2:10:27 PM	H2 valve opened
7/16/2012	2:10:27 PM	BCl3 valve opened
7/16/2012	2:10:27 PM	SiCl4 pre valve opened
7/16/2012	2:10:27 PM	SiCl4 post valve opened
7/16/2012	2:10:27 PM	Bubbler valve opened
7/16/2012	2:10:27 PM	Helium MFC set to  0.000000
7/16/2012	2:10:27 PM	H2 MFC set to  450.000000
7/16/2012	2:10:28 PM	BCl3 MFC set to  1.000000
7/16/2012	2:10:28 PM	PH3 MFC set to  0.000000
7/16/2012	2:10:28 PM	SiCl4 MFC set to  50.000000
7/16/2012	2:10:28 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	2:10:28 PM	Tube furnace set to 1000
7/16/2012	2:44:27 PM	Helium valve closed
7/16/2012	2:44:27 PM	BCl3 valve closed
7/16/2012	2:44:27 PM	PH3 valve closed
7/16/2012	2:44:28 PM	SiCl4 pre valve closed
7/16/2012	2:44:28 PM	SiCl4 post valve closed
7/16/2012	2:44:28 PM	Main Vac valve closed
7/16/2012	2:44:28 PM	Bypass valve closed
7/16/2012	2:44:28 PM	H2 valve opened
7/16/2012	2:44:28 PM	Bubbler valve opened
7/16/2012	2:44:28 PM	Helium MFC set to  0.000000
7/16/2012	2:44:28 PM	H2 MFC set to  500.000000
7/16/2012	2:44:28 PM	BCl3 MFC set to  0.000000
7/16/2012	2:44:28 PM	PH3 MFC set to  0.000000
7/16/2012	2:44:28 PM	SiCl4 MFC set to  0.000000
7/16/2012	2:44:28 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	2:44:28 PM	Tube furnace set to 750
7/16/2012	2:59:28 PM	Helium valve closed
7/16/2012	2:59:28 PM	BCl3 valve closed
7/16/2012	2:59:28 PM	PH3 valve closed
7/16/2012	2:59:28 PM	SiCl4 pre valve closed
7/16/2012	2:59:28 PM	SiCl4 post valve closed
7/16/2012	2:59:28 PM	Main Vac valve closed
7/16/2012	2:59:28 PM	Bypass valve closed
7/16/2012	2:59:28 PM	H2 valve opened
7/16/2012	2:59:28 PM	Bubbler valve opened
7/16/2012	2:59:28 PM	Helium MFC set to  0.000000
7/16/2012	2:59:28 PM	H2 MFC set to  500.000000
7/16/2012	2:59:28 PM	BCl3 MFC set to  0.000000
7/16/2012	2:59:28 PM	PH3 MFC set to  0.000000
7/16/2012	2:59:28 PM	SiCl4 MFC set to  0.000000
7/16/2012	2:59:28 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	2:59:28 PM	Tube furnace set to 0
7/16/2012	3:19:28 PM	Helium valve closed
7/16/2012	3:19:28 PM	H2 valve closed
7/16/2012	3:19:28 PM	BCl3 valve closed
7/16/2012	3:19:28 PM	PH3 valve closed
7/16/2012	3:19:28 PM	SiCl4 pre valve closed
7/16/2012	3:19:28 PM	SiCl4 post valve closed
7/16/2012	3:19:28 PM	Main Vac valve closed
7/16/2012	3:19:28 PM	Bypass valve closed
7/16/2012	3:19:28 PM	Bubbler valve closed
7/16/2012	3:19:28 PM	Helium MFC set to  0.000000
7/16/2012	3:19:28 PM	H2 MFC set to  0.000000
7/16/2012	3:19:28 PM	BCl3 MFC set to  0.000000
7/16/2012	3:19:28 PM	PH3 MFC set to  0.000000
7/16/2012	3:19:28 PM	SiCl4 MFC set to  0.000000
7/16/2012	3:19:28 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	3:19:28 PM	Tube furnace set to 0
7/16/2012	3:19:31 PM	Helium valve closed
7/16/2012	3:19:31 PM	H2 valve closed
7/16/2012	3:19:31 PM	BCl3 valve closed
7/16/2012	3:19:31 PM	PH3 valve closed
7/16/2012	3:19:31 PM	SiCl4 pre valve closed
7/16/2012	3:19:31 PM	SiCl4 post valve closed
7/16/2012	3:19:31 PM	Main Vac valve closed
7/16/2012	3:19:31 PM	Bubbler valve closed
7/16/2012	3:19:31 PM	Bypass valve opened
7/16/2012	3:19:31 PM	Helium MFC set to  0.000000
7/16/2012	3:19:31 PM	H2 MFC set to  0.000000
7/16/2012	3:19:31 PM	BCl3 MFC set to  0.000000
7/16/2012	3:19:31 PM	PH3 MFC set to  0.000000
7/16/2012	3:19:31 PM	SiCl4 MFC set to  0.000000
7/16/2012	3:19:31 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	3:19:31 PM	Tube furnace set to 0
7/16/2012	3:20:04 PM	Helium valve closed
7/16/2012	3:20:04 PM	H2 valve closed
7/16/2012	3:20:04 PM	BCl3 valve closed
7/16/2012	3:20:04 PM	PH3 valve closed
7/16/2012	3:20:04 PM	SiCl4 pre valve closed
7/16/2012	3:20:04 PM	SiCl4 post valve closed
7/16/2012	3:20:04 PM	Main Vac valve closed
7/16/2012	3:20:04 PM	Bubbler valve closed
7/16/2012	3:20:04 PM	Bypass valve opened
7/16/2012	3:20:04 PM	Helium MFC set to  0.000000
7/16/2012	3:20:04 PM	H2 MFC set to  0.000000
7/16/2012	3:20:04 PM	BCl3 MFC set to  0.000000
7/16/2012	3:20:04 PM	PH3 MFC set to  0.000000
7/16/2012	3:20:04 PM	SiCl4 MFC set to  0.000000
7/16/2012	3:20:04 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	3:20:04 PM	Tube furnace set to 0
7/16/2012	3:21:04 PM	Helium valve closed
7/16/2012	3:21:04 PM	H2 valve closed
7/16/2012	3:21:04 PM	BCl3 valve closed
7/16/2012	3:21:04 PM	PH3 valve closed
7/16/2012	3:21:04 PM	SiCl4 pre valve closed
7/16/2012	3:21:04 PM	SiCl4 post valve closed
7/16/2012	3:21:04 PM	Bypass valve closed
7/16/2012	3:21:04 PM	Bubbler valve closed
7/16/2012	3:21:04 PM	Main Vac valve opened
7/16/2012	3:21:04 PM	Helium MFC set to  0.000000
7/16/2012	3:21:04 PM	H2 MFC set to  0.000000
7/16/2012	3:21:04 PM	BCl3 MFC set to  0.000000
7/16/2012	3:21:04 PM	PH3 MFC set to  0.000000
7/16/2012	3:21:04 PM	SiCl4 MFC set to  0.000000
7/16/2012	3:21:04 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	3:21:04 PM	Tube furnace set to 0
7/16/2012	3:51:32 PM	Run finished at 3:51 PM
7/16/2012	3:51:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2012	3:51:45 PM	Recipe started at 3:51 PM
7/16/2012	3:51:45 PM	Helium valve closed
7/16/2012	3:51:45 PM	H2 valve closed
7/16/2012	3:51:45 PM	BCl3 valve closed
7/16/2012	3:51:45 PM	PH3 valve closed
7/16/2012	3:51:45 PM	SiCl4 pre valve closed
7/16/2012	3:51:45 PM	SiCl4 post valve closed
7/16/2012	3:51:45 PM	Main Vac valve closed
7/16/2012	3:51:45 PM	Bypass valve closed
7/16/2012	3:51:45 PM	Bubbler valve closed
7/16/2012	3:51:45 PM	Helium MFC set to  0.000000
7/16/2012	3:51:45 PM	H2 MFC set to  0.000000
7/16/2012	3:51:45 PM	BCl3 MFC set to  0.000000
7/16/2012	3:51:45 PM	PH3 MFC set to  0.000000
7/16/2012	3:51:45 PM	SiCl4 MFC set to  0.000000
7/16/2012	3:51:45 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	3:51:45 PM	Tube furnace set to 0
7/16/2012	3:51:48 PM	H2 valve closed
7/16/2012	3:51:48 PM	BCl3 valve closed
7/16/2012	3:51:48 PM	PH3 valve closed
7/16/2012	3:51:48 PM	SiCl4 pre valve closed
7/16/2012	3:51:48 PM	SiCl4 post valve closed
7/16/2012	3:51:48 PM	Main Vac valve closed
7/16/2012	3:51:48 PM	Bypass valve closed
7/16/2012	3:51:48 PM	Bubbler valve closed
7/16/2012	3:51:48 PM	Helium valve opened
7/16/2012	3:51:48 PM	Helium MFC set to  500.000000
7/16/2012	3:51:48 PM	H2 MFC set to  0.000000
7/16/2012	3:51:48 PM	BCl3 MFC set to  0.000000
7/16/2012	3:51:48 PM	PH3 MFC set to  0.000000
7/16/2012	3:51:48 PM	SiCl4 MFC set to  0.000000
7/16/2012	3:51:48 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	3:51:48 PM	Tube furnace set to 0
7/16/2012	3:52:58 PM	Helium valve closed
7/16/2012	3:52:58 PM	H2 valve closed
7/16/2012	3:52:58 PM	BCl3 valve closed
7/16/2012	3:52:58 PM	PH3 valve closed
7/16/2012	3:52:58 PM	SiCl4 pre valve closed
7/16/2012	3:52:58 PM	SiCl4 post valve closed
7/16/2012	3:52:58 PM	Main Vac valve closed
7/16/2012	3:52:58 PM	Bypass valve closed
7/16/2012	3:52:58 PM	Bubbler valve closed
7/16/2012	3:52:58 PM	Helium MFC set to  0.000000
7/16/2012	3:52:58 PM	H2 MFC set to  0.000000
7/16/2012	3:52:58 PM	BCl3 MFC set to  0.000000
7/16/2012	3:52:58 PM	PH3 MFC set to  0.000000
7/16/2012	3:52:58 PM	SiCl4 MFC set to  0.000000
7/16/2012	3:52:58 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	3:52:58 PM	Tube furnace set to 0
7/16/2012	3:52:59 PM	Run finished at 3:52 PM
7/16/2012	3:52:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2012	4:00:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2012	4:00:06 PM	Recipe started at 4:00 PM
7/16/2012	4:00:06 PM	Helium valve closed
7/16/2012	4:00:06 PM	H2 valve closed
7/16/2012	4:00:06 PM	BCl3 valve closed
7/16/2012	4:00:06 PM	PH3 valve closed
7/16/2012	4:00:06 PM	SiCl4 pre valve closed
7/16/2012	4:00:06 PM	SiCl4 post valve closed
7/16/2012	4:00:06 PM	Main Vac valve closed
7/16/2012	4:00:06 PM	Bubbler valve closed
7/16/2012	4:00:06 PM	Bypass valve opened
7/16/2012	4:00:06 PM	Helium MFC set to  0.000000
7/16/2012	4:00:06 PM	H2 MFC set to  0.000000
7/16/2012	4:00:06 PM	BCl3 MFC set to  0.000000
7/16/2012	4:00:07 PM	PH3 MFC set to  0.000000
7/16/2012	4:00:07 PM	SiCl4 MFC set to  0.000000
7/16/2012	4:00:07 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	4:00:07 PM	Tube furnace set to 0
7/16/2012	4:01:17 PM	Helium valve closed
7/16/2012	4:01:17 PM	H2 valve closed
7/16/2012	4:01:17 PM	BCl3 valve closed
7/16/2012	4:01:17 PM	PH3 valve closed
7/16/2012	4:01:17 PM	SiCl4 pre valve closed
7/16/2012	4:01:17 PM	SiCl4 post valve closed
7/16/2012	4:01:17 PM	Main Vac valve closed
7/16/2012	4:01:17 PM	Bubbler valve closed
7/16/2012	4:01:17 PM	Bypass valve opened
7/16/2012	4:01:17 PM	Helium MFC set to  0.000000
7/16/2012	4:01:17 PM	H2 MFC set to  0.000000
7/16/2012	4:01:17 PM	BCl3 MFC set to  0.000000
7/16/2012	4:01:17 PM	PH3 MFC set to  0.000000
7/16/2012	4:01:17 PM	SiCl4 MFC set to  0.000000
7/16/2012	4:01:17 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	4:01:17 PM	Tube furnace set to 0
7/16/2012	4:02:17 PM	Helium valve closed
7/16/2012	4:02:17 PM	H2 valve closed
7/16/2012	4:02:17 PM	BCl3 valve closed
7/16/2012	4:02:17 PM	PH3 valve closed
7/16/2012	4:02:17 PM	SiCl4 pre valve closed
7/16/2012	4:02:17 PM	SiCl4 post valve closed
7/16/2012	4:02:17 PM	Bypass valve closed
7/16/2012	4:02:17 PM	Bubbler valve closed
7/16/2012	4:02:17 PM	Main Vac valve opened
7/16/2012	4:02:17 PM	Helium MFC set to  0.000000
7/16/2012	4:02:17 PM	H2 MFC set to  0.000000
7/16/2012	4:02:17 PM	BCl3 MFC set to  0.000000
7/16/2012	4:02:17 PM	PH3 MFC set to  0.000000
7/16/2012	4:02:17 PM	SiCl4 MFC set to  0.000000
7/16/2012	4:02:17 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	4:02:17 PM	Tube furnace set to 0
7/16/2012	4:02:18 PM	Run finished at 4:02 PM
7/16/2012	4:02:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2012	4:02:27 PM	Recipe started at 4:02 PM
7/16/2012	4:02:27 PM	Helium valve closed
7/16/2012	4:02:27 PM	H2 valve closed
7/16/2012	4:02:27 PM	BCl3 valve closed
7/16/2012	4:02:27 PM	PH3 valve closed
7/16/2012	4:02:27 PM	SiCl4 pre valve closed
7/16/2012	4:02:27 PM	SiCl4 post valve closed
7/16/2012	4:02:27 PM	Bypass valve closed
7/16/2012	4:02:27 PM	Bubbler valve closed
7/16/2012	4:02:27 PM	Main Vac valve opened
7/16/2012	4:02:27 PM	Helium MFC set to  0.000000
7/16/2012	4:02:27 PM	H2 MFC set to  0.000000
7/16/2012	4:02:27 PM	BCl3 MFC set to  0.000000
7/16/2012	4:02:27 PM	PH3 MFC set to  0.000000
7/16/2012	4:02:27 PM	SiCl4 MFC set to  0.000000
7/16/2012	4:02:27 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	4:02:27 PM	Tube furnace set to 0
7/16/2012	7:02:27 PM	Helium valve closed
7/16/2012	7:02:27 PM	H2 valve closed
7/16/2012	7:02:27 PM	BCl3 valve closed
7/16/2012	7:02:27 PM	PH3 valve closed
7/16/2012	7:02:27 PM	SiCl4 pre valve closed
7/16/2012	7:02:27 PM	SiCl4 post valve closed
7/16/2012	7:02:27 PM	Main Vac valve closed
7/16/2012	7:02:27 PM	Bypass valve closed
7/16/2012	7:02:27 PM	Bubbler valve closed
7/16/2012	7:02:27 PM	Helium MFC set to  0.000000
7/16/2012	7:02:27 PM	H2 MFC set to  0.000000
7/16/2012	7:02:27 PM	BCl3 MFC set to  0.000000
7/16/2012	7:02:27 PM	PH3 MFC set to  0.000000
7/16/2012	7:02:27 PM	SiCl4 MFC set to  0.000000
7/16/2012	7:02:27 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	7:02:27 PM	Tube furnace set to 0
7/16/2012	7:02:30 PM	Helium valve closed
7/16/2012	7:02:30 PM	BCl3 valve closed
7/16/2012	7:02:30 PM	PH3 valve closed
7/16/2012	7:02:30 PM	SiCl4 pre valve closed
7/16/2012	7:02:30 PM	SiCl4 post valve closed
7/16/2012	7:02:30 PM	Main Vac valve closed
7/16/2012	7:02:30 PM	Bypass valve closed
7/16/2012	7:02:30 PM	Bubbler valve closed
7/16/2012	7:02:30 PM	H2 valve opened
7/16/2012	7:02:30 PM	Helium MFC set to  0.000000
7/16/2012	7:02:30 PM	H2 MFC set to  500.000000
7/16/2012	7:02:30 PM	BCl3 MFC set to  0.000000
7/16/2012	7:02:30 PM	PH3 MFC set to  0.000000
7/16/2012	7:02:30 PM	SiCl4 MFC set to  0.000000
7/16/2012	7:02:30 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	7:02:31 PM	Tube furnace set to 0
7/16/2012	7:03:46 PM	Helium valve closed
7/16/2012	7:03:46 PM	BCl3 valve closed
7/16/2012	7:03:46 PM	PH3 valve closed
7/16/2012	7:03:46 PM	SiCl4 pre valve closed
7/16/2012	7:03:46 PM	SiCl4 post valve closed
7/16/2012	7:03:46 PM	Main Vac valve closed
7/16/2012	7:03:46 PM	Bypass valve closed
7/16/2012	7:03:46 PM	H2 valve opened
7/16/2012	7:03:46 PM	Bubbler valve opened
7/16/2012	7:03:46 PM	Helium MFC set to  0.000000
7/16/2012	7:03:46 PM	H2 MFC set to  500.000000
7/16/2012	7:03:46 PM	BCl3 MFC set to  0.000000
7/16/2012	7:03:46 PM	PH3 MFC set to  0.000000
7/16/2012	7:03:46 PM	SiCl4 MFC set to  0.000000
7/16/2012	7:03:46 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	7:03:46 PM	Tube furnace set to 0
7/16/2012	7:03:47 PM	Helium valve closed
7/16/2012	7:03:47 PM	BCl3 valve closed
7/16/2012	7:03:47 PM	PH3 valve closed
7/16/2012	7:03:47 PM	SiCl4 pre valve closed
7/16/2012	7:03:47 PM	SiCl4 post valve closed
7/16/2012	7:03:47 PM	Main Vac valve closed
7/16/2012	7:03:47 PM	Bypass valve closed
7/16/2012	7:03:47 PM	H2 valve opened
7/16/2012	7:03:47 PM	Bubbler valve opened
7/16/2012	7:03:47 PM	Helium MFC set to  0.000000
7/16/2012	7:03:47 PM	H2 MFC set to  500.000000
7/16/2012	7:03:47 PM	BCl3 MFC set to  0.000000
7/16/2012	7:03:47 PM	PH3 MFC set to  0.000000
7/16/2012	7:03:47 PM	SiCl4 MFC set to  0.000000
7/16/2012	7:03:47 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	7:03:47 PM	Tube furnace set to 1000
7/16/2012	7:28:47 PM	Helium valve closed
7/16/2012	7:28:47 PM	PH3 valve closed
7/16/2012	7:28:47 PM	Main Vac valve closed
7/16/2012	7:28:47 PM	Bypass valve closed
7/16/2012	7:28:47 PM	H2 valve opened
7/16/2012	7:28:47 PM	BCl3 valve opened
7/16/2012	7:28:47 PM	SiCl4 pre valve opened
7/16/2012	7:28:47 PM	SiCl4 post valve opened
7/16/2012	7:28:47 PM	Bubbler valve opened
7/16/2012	7:28:47 PM	Helium MFC set to  0.000000
7/16/2012	7:28:47 PM	H2 MFC set to  450.000000
7/16/2012	7:28:47 PM	BCl3 MFC set to  1.000000
7/16/2012	7:28:47 PM	PH3 MFC set to  0.000000
7/16/2012	7:28:47 PM	SiCl4 MFC set to  50.000000
7/16/2012	7:28:47 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	7:28:48 PM	Tube furnace set to 1000
7/16/2012	8:02:47 PM	Helium valve closed
7/16/2012	8:02:47 PM	BCl3 valve closed
7/16/2012	8:02:47 PM	Main Vac valve closed
7/16/2012	8:02:47 PM	Bypass valve closed
7/16/2012	8:02:47 PM	H2 valve opened
7/16/2012	8:02:47 PM	PH3 valve opened
7/16/2012	8:02:47 PM	SiCl4 pre valve opened
7/16/2012	8:02:47 PM	SiCl4 post valve opened
7/16/2012	8:02:47 PM	Bubbler valve opened
7/16/2012	8:02:47 PM	Helium MFC set to  0.000000
7/16/2012	8:02:47 PM	H2 MFC set to  430.000000
7/16/2012	8:02:47 PM	BCl3 MFC set to  0.000000
7/16/2012	8:02:47 PM	PH3 MFC set to  20.000000
7/16/2012	8:02:47 PM	SiCl4 MFC set to  50.000000
7/16/2012	8:02:47 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	8:02:48 PM	Tube furnace set to 1000
7/16/2012	8:04:48 PM	Helium valve closed
7/16/2012	8:04:48 PM	BCl3 valve closed
7/16/2012	8:04:48 PM	PH3 valve closed
7/16/2012	8:04:48 PM	SiCl4 pre valve closed
7/16/2012	8:04:48 PM	SiCl4 post valve closed
7/16/2012	8:04:48 PM	Main Vac valve closed
7/16/2012	8:04:48 PM	Bypass valve closed
7/16/2012	8:04:48 PM	H2 valve opened
7/16/2012	8:04:48 PM	Bubbler valve opened
7/16/2012	8:04:48 PM	Helium MFC set to  0.000000
7/16/2012	8:04:48 PM	H2 MFC set to  500.000000
7/16/2012	8:04:48 PM	BCl3 MFC set to  0.000000
7/16/2012	8:04:48 PM	PH3 MFC set to  0.000000
7/16/2012	8:04:48 PM	SiCl4 MFC set to  0.000000
7/16/2012	8:04:48 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	8:04:48 PM	Tube furnace set to 750
7/16/2012	8:19:48 PM	H2 valve closed
7/16/2012	8:19:48 PM	BCl3 valve closed
7/16/2012	8:19:48 PM	PH3 valve closed
7/16/2012	8:19:48 PM	SiCl4 pre valve closed
7/16/2012	8:19:48 PM	SiCl4 post valve closed
7/16/2012	8:19:48 PM	Main Vac valve closed
7/16/2012	8:19:48 PM	Bypass valve closed
7/16/2012	8:19:48 PM	Helium valve opened
7/16/2012	8:19:48 PM	Bubbler valve opened
7/16/2012	8:19:48 PM	Helium MFC set to  500.000000
7/16/2012	8:19:48 PM	H2 MFC set to  0.000000
7/16/2012	8:19:48 PM	BCl3 MFC set to  0.000000
7/16/2012	8:19:48 PM	PH3 MFC set to  0.000000
7/16/2012	8:19:48 PM	SiCl4 MFC set to  0.000000
7/16/2012	8:19:48 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	8:19:48 PM	Tube furnace set to 0
7/16/2012	8:39:48 PM	Helium valve closed
7/16/2012	8:39:48 PM	H2 valve closed
7/16/2012	8:39:48 PM	BCl3 valve closed
7/16/2012	8:39:48 PM	PH3 valve closed
7/16/2012	8:39:48 PM	SiCl4 pre valve closed
7/16/2012	8:39:48 PM	SiCl4 post valve closed
7/16/2012	8:39:48 PM	Main Vac valve closed
7/16/2012	8:39:48 PM	Bypass valve closed
7/16/2012	8:39:48 PM	Bubbler valve closed
7/16/2012	8:39:48 PM	Helium MFC set to  0.000000
7/16/2012	8:39:48 PM	H2 MFC set to  0.000000
7/16/2012	8:39:48 PM	BCl3 MFC set to  0.000000
7/16/2012	8:39:48 PM	PH3 MFC set to  0.000000
7/16/2012	8:39:48 PM	SiCl4 MFC set to  0.000000
7/16/2012	8:39:48 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	8:39:48 PM	Tube furnace set to 0
7/16/2012	8:59:48 PM	Helium valve closed
7/16/2012	8:59:48 PM	H2 valve closed
7/16/2012	8:59:48 PM	BCl3 valve closed
7/16/2012	8:59:48 PM	PH3 valve closed
7/16/2012	8:59:48 PM	SiCl4 pre valve closed
7/16/2012	8:59:48 PM	SiCl4 post valve closed
7/16/2012	8:59:48 PM	Main Vac valve closed
7/16/2012	8:59:48 PM	Bubbler valve closed
7/16/2012	8:59:48 PM	Bypass valve opened
7/16/2012	8:59:48 PM	Helium MFC set to  0.000000
7/16/2012	8:59:48 PM	H2 MFC set to  0.000000
7/16/2012	8:59:48 PM	BCl3 MFC set to  0.000000
7/16/2012	8:59:48 PM	PH3 MFC set to  0.000000
7/16/2012	8:59:48 PM	SiCl4 MFC set to  0.000000
7/16/2012	8:59:48 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	8:59:48 PM	Tube furnace set to 0
7/16/2012	9:00:40 PM	Helium valve closed
7/16/2012	9:00:40 PM	H2 valve closed
7/16/2012	9:00:40 PM	BCl3 valve closed
7/16/2012	9:00:40 PM	PH3 valve closed
7/16/2012	9:00:40 PM	SiCl4 pre valve closed
7/16/2012	9:00:40 PM	SiCl4 post valve closed
7/16/2012	9:00:40 PM	Main Vac valve closed
7/16/2012	9:00:40 PM	Bubbler valve closed
7/16/2012	9:00:40 PM	Bypass valve opened
7/16/2012	9:00:40 PM	Helium MFC set to  0.000000
7/16/2012	9:00:40 PM	H2 MFC set to  0.000000
7/16/2012	9:00:40 PM	BCl3 MFC set to  0.000000
7/16/2012	9:00:40 PM	PH3 MFC set to  0.000000
7/16/2012	9:00:40 PM	SiCl4 MFC set to  0.000000
7/16/2012	9:00:40 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	9:00:40 PM	Tube furnace set to 0
7/16/2012	9:01:40 PM	Helium valve closed
7/16/2012	9:01:40 PM	H2 valve closed
7/16/2012	9:01:40 PM	BCl3 valve closed
7/16/2012	9:01:40 PM	PH3 valve closed
7/16/2012	9:01:40 PM	SiCl4 pre valve closed
7/16/2012	9:01:40 PM	SiCl4 post valve closed
7/16/2012	9:01:40 PM	Bypass valve closed
7/16/2012	9:01:40 PM	Bubbler valve closed
7/16/2012	9:01:40 PM	Main Vac valve opened
7/16/2012	9:01:40 PM	Helium MFC set to  0.000000
7/16/2012	9:01:40 PM	H2 MFC set to  0.000000
7/16/2012	9:01:40 PM	BCl3 MFC set to  0.000000
7/16/2012	9:01:40 PM	PH3 MFC set to  0.000000
7/16/2012	9:01:40 PM	SiCl4 MFC set to  0.000000
7/16/2012	9:01:40 PM	Bypass solenoid MFC set to  0.000000
7/16/2012	9:01:40 PM	Tube furnace set to 0
7/16/2012	10:01:40 PM	Run finished at 10:01 PM
